Temperature adjusting apparatus, processing apparatus, and article manufacturing method

• Main Authors: YAMAGAMI YUYA, YAMADA SHUJI, FUJI HIROMITSU, FUNAYOSHI KAZUNARI, AOKI MASASHI
• Format: Patent
• Language: Chinese; English
• Published: 23.12.2022
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; COMBINED HEATING AND REFRIGERATION SYSTEMS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HEAT PUMP SYSTEMS; HEATING; LIGHTING; LIQUEFACTION SOLIDIFICATION OF GASES; MANUFACTURE OR STORAGE OF ICE; MECHANICAL ENGINEERING; REFRIGERATION MACHINES, PLANTS OR SYSTEMS; REFRIGERATION OR COOLING; SEMICONDUCTOR DEVICES; WEAPONS

The invention relates to a temperature adjusting apparatus, a processing apparatus, and an article manufacturing method. A temperature adjusting device is provided with: a first heat exchanger having a first inlet end and a first outlet end; the second heat exchanger is provided with a second inlet end and a second outlet end; a first flow path connecting the first outlet end and a branch part; a second flow path that connects the branching section and the converging section and is disposed so as to cool the first heat source; a third flow path connecting the branch part and the second inlet end; a fourth flow path which connects the second outlet end and the converging part and is configured to cool a second heat source; a fifth flow path connecting the converging portion and the first inlet end; a first heater disposed between the branch portion in the second flow path and the first heat source; a second heater disposed between the second outlet end in the fourth flow path and the second heat source; and a