MEMS piezoelectric loudspeaker

• Main Authors: XIAO YEHUI, GAO CHUANHAI, WU QINGQING, HUANG JINGZE
• Format: Patent
• Language: Chinese; English
• Published: 16.12.2022
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; PUBLIC ADDRESS SYSTEMS; TRANSPORTING

The invention discloses an MEMS (micro-electromechanical system) piezoelectric loudspeaker, which comprises a hollow shell, a voice diaphragm and an MEMS piezoelectric actuator, wherein the periphery of the voice diaphragm is fixed on the shell, the MEMS piezoelectric actuator is mounted in the shell, and a sound cavity is formed among the shell, the voice diaphragm and the MEMS piezoelectric actuator; the MEMS piezoelectric actuator is provided with a flow guide opening of the sound cavity, and when the MEMS piezoelectric actuator works at a first resonant frequency, the flow guide opening can be switched between a first state in which air flow is sucked into the sound cavity and a second state in which the air flow of the sound cavity is guided out. The voice diaphragm can generate vibration when the diversion port repeatedly switches the first state and the second state for a preset number of times. According to the invention, the size of the device can be controlled to be smaller, the cost is lower, and t