Preparation method of temperature and pressure monitoring sensor for grease of main bearing of shield tunneling machine

• Main Authors: GAO HUIZHONG, CHEN RUIXIANG, YANG HONGYONG, LUO WEN, ZHANG HEPEI, QIN YINPING, WANG YUXIANG, ZHENG LIANWEI, WANG KAI, XU KEYANG, LI FENGYUAN, YAN JINZE, LI ZHIGUO, DING HAILING, MEI XIAOHAI, ZHANG YALIN, WEI JUNTAO, ZENG CHUIGANG, LUO GUOXI, YU JING, KANG ZUWEI
• Format: Patent
• Language: Chinese; English
• Published: 13.12.2022
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; PHYSICS; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

The invention discloses a preparation method of a shield tunneling machine main bearing grease temperature and pressure monitoring sensor, and relates to the technical field of shield tunneling machine main bearing grease temperature and pressure monitoring sensors. Comprising the steps of thermal oxidation, etching of a light doping lead, heavy doping of a lead, etching of a lead hole, TSV-etching of a through hole, TSV copper casting, etching of a vacuum chamber, bonding of a dielectric layer, substrate bonding, back cavity deep silicon etching, a platinum thermistor, rewiring (RDL), a solder mask, a soldering aid layer and ball planting. The temperature and pressure integrated sensor has the beneficial effects that real-time online detection and monitoring of temperature and pressure can be realized by adopting a temperature and pressure integrated sensor preparation method, and a complicated sensor preparation process is broken through; according to the method, the DRIE which is smooth in inner wall of th