Vertical LED chip structure, manufacturing method thereof and light-emitting device

• Main Authors: HU PENGJIE, KE WEIFAN, LIU JIAYU, LIU SHENGNAN, BAI XIAO
• Format: Patent
• Language: Chinese; English
• Published: 09.12.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention provides a vertical LED chip structure, a manufacturing method thereof and a light-emitting device, after an epitaxial structure is bonded to a substrate, the epitaxial structure is etched to form a first table top, and after the first table top is formed, the epitaxial structure continues to be etched at the first table top until the epitaxial structure is etched through to expose a reflecting layer, and a second table top is formed. The width of the second table top is smaller than that of the first table top, the height difference exists between the first table top and the second table top, the structure can effectively reduce internal reflection of large-angle light in the epitaxial structure, secondary absorption of the light is reduced, and the side light emitting rate is improved. A protective layer is formed on the surface of the structure on which the first table top and the second table top are formed, and the protective layer covers the exposed reflecting layer at the second table top