Sensor and method for performing reference measurements with directed thermal radiation

• Main Authors: STOCK GREG, AUSTERMANN, TOBIAS, KOVACS CHRISTOPHER, THOMAS GRILLE, ASCHAUER, EBERHARD, BARTH UDO
• Format: Patent
• Language: Chinese; English
• Published: 06.12.2022
• Subjects: MEASURING; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; PHYSICS; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

A fluid sensor for performing reference measurements, the fluid sensor comprising a support structure having a top major surface area, where the top major surface area of the support structure constitutes a common system plane of the sensor. Further, the fluid sensor includes a thermal emitter on the top major surface region of the support structure, where the thermal emitter is configured to emit thermal radiation. The fluid sensor further includes a first waveguide section on the top major surface region of the support structure, and a first thermal radiation detector on the top major surface region of the support structure, and a cover structure on at least a portion of the first waveguide section, where the cover structure is configured to seal at least a portion of the first waveguide section. Further, the first waveguide section is configured to guide a first portion of the thermal radiation emitted by the thermal emitter to the first thermal radiation detector, and the first thermal radiation detector