Cleaning device

• Main Authors: INAKAZU, SUSUMU, TAJIRI KAZUTAKA
• Format: Patent
• Language: Chinese; English
• Published: 06.12.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMISTRY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; METALLURGY; SEMICONDUCTOR DEVICES; TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE

Provided is a cleaning device that reduces the installation space of a pure water generating device, facilitates the water quality management of cleaning water, simplifies a mechanism for providing cleaning water to an object to be cleaned, and improves the efficiency of providing cleaning water to the object to be cleaned. The cleaning device cleans an object to be cleaned with cleaning water, recovers waste liquid to regenerate and circulate pure water, and comprises a holding table for holding the object to be cleaned; a cleaning water supply nozzle for supplying cleaning water to the object to be cleaned held by the holding table; a waste liquid tank for storing the used cleaning water as a waste liquid; a waste liquid pump which draws the waste liquid from the waste liquid tank; a filter that filters the waste liquid drawn by the waste liquid pump and purifies the waste liquid into clear water; a clear water tank for accommodating the clear water; an ultraviolet light source that irradiates the clear wat