Silicon nitride production process control method, device and equipment

• Main Authors: FENG LIUJIAN, WANG FEI, WANG SIJIA, CHEN XIAOHUA, LIU XINGPING, CHEN XIQING, WU WANLI, ZHANG JIWU
• Format: Patent
• Language: Chinese; English
• Published: 02.12.2022
• Subjects: BLASTING; CHEMISTRY; COMPOUNDS THEREOF; DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE; FURNACES; HEATING; INORGANIC CHEMISTRY; KILNS; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; NON-METALLIC ELEMENTS; OVENS; RETORTS; WEAPONS

The invention provides a silicon nitride production process control method, device and equipment, and relates to the technical field of control, the silicon nitride production process control method comprises the following steps: obtaining production information of a nitriding furnace in a silicon nitride production process, the production information comprises at least one of the following items: an in-furnace vacuum value of the nitriding furnace, an in-furnace temperature of the nitriding furnace, an in-furnace pressure of the nitriding furnace, production time, a control action mark and a production process section number; and controlling the production process flow of the silicon nitride according to the production information. According to the scheme, the production information of the nitriding furnace in the silicon nitride production process is obtained, and the production process flow of the silicon nitride is controlled according to the production information, that is, manual operation control is no