MEMS piezoelectric loudspeaker and processing method thereof

• Main Authors: XIAO YEHUI, GAO CHUANHAI, WU QINGQING, HUANG JINGZE
• Format: Patent
• Language: Chinese; English
• Published: 29.11.2022
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; PUBLIC ADDRESS SYSTEMS; TRANSPORTING

The invention discloses an MEMS piezoelectric loudspeaker and a processing method thereof, and relates to the field of loudspeakers, and the MEMS piezoelectric loudspeaker comprises a bottom plate used for playing a supporting role; the piezoelectric unit is arranged on the bottom plate, and a first cavity penetrating in the axis direction of the piezoelectric unit is formed in the piezoelectric unit; the vibrating diaphragm is arranged on one side, back on to the bottom plate, of the piezoelectric unit and is made of a metal film; and the vibrating diaphragm covers the first cavity. The reliability of the device can be effectively improved, the structure of the device is simplified, and the packaging process is reduced. 本发明公开了一种MEMS压电扬声器及其加工方法，涉及扬声器领域，所述MEMS压电扬声器包括：用于起到支撑作用的底板；设置在所述底板上的压电单元，所述压电单元形成有沿其轴线方向贯穿的第一空腔；设置在所述压电单元背向所述底板一侧的由金属薄膜制成的振膜，所述振膜覆盖所述第一空腔。本申请能够有效提高器件的可靠性，简化器件的结构，减少封装流程。