Etching liquid composition and preparation method thereof

• Main Authors: OH JUNG SHIK, KIM KI YOUNG, KIM TAE-HO, LEE MYUNG-HO, SONG MYUNG GEUN
• Format: Patent
• Language: Chinese; English
• Published: 25.11.2022
• Subjects: ADHESIVES; BASIC ELECTRIC ELEMENTS; CHEMISTRY; DYES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; PAINTS; POLISHES; SEMICONDUCTOR DEVICES

The present invention relates to a silicon etching liquid composition and a method for preparing the same, and more particularly, to a composition for selectively etching silicon for a silicon insulating film. The etching liquid composition according to the present invention can improve the selectiv...