Nano-particle assembly material gas sensor with enhanced moisture resistance and preparation method of nano-particle assembly material gas sensor

• Main Authors: XIE BO, YOU HAI, XIA SHENGJIE, WEN HUIMIN, ZHANG AOXUE, SUN JIAN, MAO XIBING, LI ZENGHUI, ZHOU XINGQUAN
• Format: Patent
• Language: Chinese; English
• Published: 15.11.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention discloses a nano particle assembly material gas sensitive sensor capable of enhancing moisture resistance and a preparation method thereof.The gas sensitive sensor comprises an interdigital electrode with an insulating substrate and metal nano particles deposited on the interdigital electrode, voltage is input to the two ends of the interdigital electrode, bias voltage is formed between interdigitals, and the metal nano particles are deposited on the interdigital electrode. A conductive path is formed through the metal nanoparticles, and an electric signal is generated as a gas-sensitive sensing response signal; the surface of the interdigital electrode and the surface of the metal nanoparticles are uniformly coated with the hydrophobic film layer, the hydrophobic film layer is one or more of PMMA, PDMS, PTFE, PFA, SiO2 and other hydrophobic materials, the hydrophobic film layer isolates the internal metal nanoparticles from water vapor in the external environment, and the surface of the metal n