Automatic control system for identifying silicon wafers in wafer box and operation method thereof

• Main Authors: TIAN DAXI, ZHANG YINGUANG, LIANG XINGBO, LI SHENZHONG, LI GANG, JIANG YULONG
• Format: Patent
• Language: Chinese; English
• Published: 11.11.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention relates to an automatic control system for identifying silicon wafers in a wafer box and an operation method of the automatic control system. The automatic control system comprises the identification wafer box, a parallel light source array, a grating piece, a two-dimensional code scanner, a full-automatic camera, an EAP control system and an MES control system. The identification wafer box is used for placing silicon wafers, and a two-dimensional code label with silicon wafer information is mounted on the identification wafer box; the parallel light source array is located below the identification sheet box, meanwhile, a grating sheet is installed on the parallel light source array, parallel light emitted by the parallel light source array penetrates through the grating sheet and the silicon wafers, and identification information for determining whether the silicon wafers are clamped or not and determining the number of the silicon wafers is formed. The method has the characteristics that the m