Continuous scanning type focusing laser differential interferometer and measuring method

• Main Authors: LI HONGXUN, YAO XIANGHONG, YUAN QIANG, CHEN SHUANG
• Format: Patent
• Language: Chinese; English
• Published: 11.11.2022
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention discloses a continuous scanning type focusing laser differential interferometer and a measurement method, and relates to the technical field of optical measurement. The interferometer comprises a laser, a first polaroid, a half-wave plate, a concave lens, a first birefringence beam splitter prism, a second birefringence beam splitter prism, a first convex lens, a second convex lens, a third birefringence beam splitter prism, a second polaroid, a fourth birefringence beam splitter prism and a photoelectric detector. The measuring point continuous scanning of the focused laser differential interferometer can be realized only by symmetrically moving the first birefringence beam splitter prism and the fourth birefringence beam splitter prism, the structural flexibility is high, and the practicability is strong. 本发明公开了一种连续扫描式聚焦激光差分干涉仪及测量方法，涉及光学测量技术领域，所述干涉仪包括：激光器、第一偏振片、半波片、凹透镜、第一双折射分光棱镜、第二双折射分光棱镜、第一凸透镜、第二凸透镜、第三双折射分光棱镜、第二偏振片、第四双折射分光棱镜和光电探测器；本发明仅需要通过对称移动第一双折射分光棱镜和第四双折射分光棱镜，便可以实现聚焦激光差分干涉仪测点连续扫描，结构灵活性高，实用