Novel superlattice structure composite film medium and preparation method thereof

• Main Authors: XIE BO, LIN GUANG, LI SHAOKUI, MOU SHUNYU, GONG YIXIA, YANG HAITAO, LIU DONGYANG, ZHANG XIAODAN
• Format: Patent
• Language: Chinese; English
• Published: 04.11.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention relates to the technical field of dielectric films, in particular to a novel superlattice structure composite film medium and a preparation method thereof.The novel superlattice structure composite film medium comprises first films and second films, the multiple layers of first films and the multiple layers of second films are alternately stacked above a substrate tray, the first films are Al2O3, the second films are HfO2, and the first films are Al2O3. In the growth process, an amorphous film is formed, so that the tunneling effect from a grain boundary between crystal grains after the film is crystallized is avoided, and the leakage current is reduced; the characteristics of two or more films are combined, the overall dielectric property of the film is improved, and particularly, the thickness and the growing layer number of each layer of film can be controlled according to different use occasions, and film materials with different dielectric properties are designed. 本发明涉及介电薄膜技术领域，具体涉及一种新型超晶格结