Arc ion plating method of diamond reinforced composite material

• Main Authors: ZHAO DONGCAI, WANG QIMIN, ZHANG ZIYANG, ZHENG JUN, ZHANG LIN
• Format: Patent
• Language: Chinese; English
• Published: 25.10.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention relates to the technical field of arc ion plating, in particular to an arc ion plating method of a diamond reinforced composite material, which comprises the following steps: (1) substrate preparation: a substrate is used as a composite material to be attached to the substrate to complete growth support; (2) preparing diamond particles; (3) vacuumizing; (4) heating; (5) introducing process gas; (6) depositing a film layer; (7) arranging diamond particles on the surface of the substrate; (8) repeating the steps (6) to (7); according to the method, the base body of the diamond reinforced composite material is prepared through the arc ion plating technology, the base body material variety is expanded to nitride, carbide and other ceramic materials from metal, and the performance of the diamond reinforced composite material is improved. 本发明涉及电弧离子镀技术领域，具体涉及一种金刚石增强复合材料的电弧离子镀方法，包括下列步骤：(1)衬底准备：衬底是作为复合材料依附其上，完成生长的支撑；(2)金刚石颗粒的准备；(3)抽真空；(4)加热；(5)通入工艺气体；(6)膜层沉积；(7)衬底表面布置金刚石颗粒；(8)重复步骤(6)至(7)；(9)热处理，本发明利用电弧离子