Cleaning auxiliary tool for spin-coating waste liquid collecting cup and spin-coating device

• Main Authors: LIU CHANGWEI, JIANG YANSONG, GENG KETAO
• Format: Patent
• Language: Chinese; English
• Published: 25.10.2022
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; CLEANING; CLEANING IN GENERAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; TRANSPORTING

The invention discloses a spin-coating waste liquid collecting cup cleaning auxiliary tool and a spin-coating device. The spin-coating waste liquid collecting cup cleaning auxiliary tool is arranged on a wafer bearing seat; a cleaning liquid spraying seat is arranged in the spin-coating waste liquid collecting cup and is arranged at the lower end of the auxiliary cleaning tool for the spin-coating waste liquid collecting cup; the spin-coating waste liquid collecting cup cleaning auxiliary tool comprises a cleaning base arranged on a wafer bearing seat and covering the top surface of the wafer bearing seat; the liquid inlet cavity is arranged around the cleaning base and provided with a liquid inlet opening facing the cleaning liquid spraying base and a liquid collecting groove located in the side, away from the cleaning base, of the liquid inlet opening, and the cleaning liquid enters the liquid collecting groove after entering from the liquid inlet opening and being blocked by the inner wall of the liquid in