Preparation method and preparation device of trichlorosilane

• Main Authors: YIN BO, WU ZHUFENG, FAN XIECHENG, SONG GAOJIE, LIU XINGPING
• Format: Patent
• Language: Chinese; English
• Published: 21.10.2022
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS

The invention discloses a preparation method of trichlorosilane, which comprises the following steps: taking silicon powder and hydrogen chloride as raw materials, carrying out synthetic reaction on the silicon powder and hydrogen chloride in a fluidized bed reactor to generate trichlorosilane, introducing silicon tetrachloride liquid as a cooling medium in the synthetic reaction process, cooling, and controlling the reaction temperature, the generation of a by-product silicon tetrachloride is reduced. The invention also discloses a preparation device of trichlorosilane, which comprises a fluidized bed reactor and a cooling mechanism, and the fluidized bed reactor is used for the synthetic reaction of silicon powder and hydrogen chloride; the cooling mechanism comprises a cooling tube bundle, the cooling tube bundle extends into the fluidized bed reactor from the upper part of the fluidized bed reactor and extends downwards along a reaction chamber of the fluidized bed reactor, silicon tetrachloride liquid is