Abnormality detection method and device, electronic equipment and storage medium

• Main Authors: HUA SHANSHAN, ZHAN WANG
• Format: Patent
• Language: Chinese; English
• Published: 14.10.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; COUNTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING RECORD CARRIERS; PHYSICS; PRESENTATION OF DATA; RECOGNITION OF DATA; RECORD CARRIERS; SEMICONDUCTOR DEVICES

The invention relates to an anomaly detection method and device, electronic equipment and a computer readable storage medium, relates to the technical field of semiconductor production testing, and can be applied to a scene for determining an anomaly generation reason in a wafer testing process. The method comprises the following steps: acquiring test data of a test subject; determining at least one test index corresponding to the test data; the test indexes comprise one or more of a yield parameter, a resistance parameter and a failure bit region; determining an abnormal judgment result of the test subject under each test index; and according to the determined abnormality determination result, determining the abnormality cause type of the abnormality of the test subject. According to the invention, by analyzing the wafer test result under multiple dimensions, the reason of abnormal test performance is quickly analyzed, and early warning is timely carried out. 本公开是关于一种异常检测方法及装置、电子设备以及计算机可读存储介质，涉及半导体生产测试技术领域，可