Unified coordinate calibrator and calibration method for micro-nano composite measurement

• Main Authors: LI RUIJUN, GONG WENCHAO, LIU YUNLONG, CHENG ZHENYING
• Format: Patent
• Language: Chinese; English
• Published: 11.10.2022
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention discloses a coordinate unification calibrator for micro-nano composite measurement and a calibration method, a micro-nano three-coordinate machine and a white light interferometer are adopted for composite measurement, and the calibrator is set to be a triangular pyramid frustum and is provided with four measuring surfaces which are all planes; a three-coordinate machine and an interferometer are adopted to measure the four measuring faces respectively, and coordinates of all vertexes of the upper end face of the triangular pyramid body are fitted; and processing each vertex coordinate by adopting a unit quaternion method to realize unification of coordinate systems of the three-coordinate machine and the interferometer. The calibrator is simple in geometrical characteristic, and the plane machining precision can be guaranteed; the calibrator provided by the invention not only solves the problem that the existing calibrator is not suitable for the calibration of the micro-nano composite measurem