Flexible PMUTs with bending and torsional deformation functions and preparation method thereof

• Main Authors: ZHAO LIBO, MA QI, LI ZIXUAN, YUAN JIAWEI, LI ZHIKANG, YANG PING, SHI XUAN, LUO GUOXI, QIN SHAOHUI, WANG XIAOZHANG, JIANG ZHUANGDE
• Format: Patent
• Language: Chinese; English
• Published: 04.10.2022
• Subjects: ELECTRICITY; FOR PERFORMING MECHANICAL WORK IN GENERAL; GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL; METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TRANSPORTING

The invention discloses a flexible PMUTs with bending and torsional deformation functions and a preparation method thereof, the flexible PMUTs comprise a flexible substrate and a plurality of transduction units arranged on the flexible substrate, and the transduction units are mutually independent; the structure layer, the flexible lower electrode, the lower piezoelectric layer, the flexible middle electrode, the upper piezoelectric layer and the flexible upper electrode of each unit are mutually independent, the transduction units are connected only through flexible materials, when the device is bent, stretched and twisted, the flexible materials are stretched or compressed, large deformation is generated, and the flexible materials are connected with the flexible middle electrode, the flexible middle electrode, the upper piezoelectric layer and the flexible upper electrode. And the piezoelectric layer and the structural layer of each unit are hardly deformed, and the upper piezoelectric layer, the lower pie