Scanning probe and electron microscope probe and manufacture thereof

• Main Authors: LYDING JOSEPH W, LOCKLEDGE SCOTT P, GIROLAMY GREGORY S, LI JUNYI
• Format: Patent
• Language: Chinese; English
• Published: 30.09.2022
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

Methods for economical manufacturing of scanning probes and electron microscope (SPEM) probe tips are described. In such a method, a plurality of wires are mounted on a table and ion milled while the table and the mounted probe are tilted and rotated at a selected angle relative to an ion source. The resulting probes are also described. The method provides a plurality of sets of very uniform probe tips having controllable properties to achieve stable and accurate scanning probe measurements and electron microscope (EM) measurements. 描述用于扫描探针和电子显微镜(SPEM)探针针尖的经济型制造的方法。在这种方法中，将多个金属丝安装在台上并且在所述台和所安装的探针相对于离子源以选定角度倾斜并旋转的同时对所述多个金属丝进行离子研磨。还描述了所得探针。所述方法提供多组非常均一的探针针尖，所述探针针尖具有可控的性质以实现稳定而精确的扫描探针测量和电子显微镜(EM)测量。