Non-parallel symmetrical metal plane gap measurement method based on eddy current measurement

• Main Authors: WANG CHUNMEI, XIE QIANG, AI YUMING, YU BAOCHENG, WANG MEI
• Format: Patent
• Language: Chinese; English
• Published: 27.09.2022
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention discloses an eddy current measurement-based non-parallel symmetrical metal plane gap measurement method. The method comprises the following steps of S1, measuring the distance from a group of sensor probes to a measured non-parallel symmetrical metal surface; one group of sensors are two opposite eddy current displacement sensors; s2, acquiring the distance between the probes of the group of sensors, and calculating the non-parallel symmetrical metal plane gap of the measuring point of the group of sensors; s3, obtaining non-parallel symmetrical metal plane gaps of the plurality of measuring points; s4, based on the non-parallel symmetric metal plane gap data of the plurality of measuring points, solving a fitting plane equation through a least square method; and S5, fitting the whole non-parallel symmetric metal plane gap according to the fitting plane equation. As the eddy current displacement sensor senses the relative position and processes the relative position into a corresponding electric