Decoupling radio frequency (RF) signal from input signal conductor of processing chamber

• Main Authors: THIRAGARAJAN, MOHAN, NICK RAY LINEBARGER JR
• Format: Patent
• Language: Chinese; English
• Published: 20.09.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

An apparatus for decoupling an RF signal from an input signal conductor of a processing chamber includes at least a first switch to decouple an energy storage element from an active element within a processing station. In a particular embodiment, when the first switch is in the open position, a second switch between the current generator and the energy storage element is closed, allowing the current generator to charge the energy storage element. In response to the energy storage element reaching a predetermined voltage, the first switch may be closed and the second switch may be opened, allowing current to discharge from the energy storage element to the active element. In some embodiments, the first and second switches are not allowed to operate simultaneously in the closed position, thereby preventing the RF from being coupled from the processing station to the current generator. 一种将RF信号从处理室的输入信号导体去耦的装置包括至少第一开关，以将能量存储元件与处理站内的有源元件去耦。在特定实施方案中，当第一开关处于断开位置时，位于电流发生器和能量存储元件之间的第二开关闭合，从而允许电流发生器对能量存储元件充电。响应于能量存储元件达