Gas sensor chip suitable for NDIR principle and preparation method thereof

• Main Authors: YANG SHAOSONG, LIU TONGQING, CAO JINYUN
• Format: Patent
• Language: Chinese; English
• Published: 20.09.2022
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CRYSTAL GROWTH; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; METALLURGY; PHYSICS; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TESTING; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

According to the gas sensor chip suitable for the NDIR principle and the preparation method of the gas sensor chip, the micro convex lens and the NDIR infrared gas sensor chip are integrated in the chip manufacturing process, so that the micro convex lens can well gather energy of infrared light in a sensitive area of an infrared detection chip, the chip output is improved, and the cost is reduced. The gas sensor is characterized in that the gas sensor comprises a chip body and a micro convex lens, the chip body and the micro convex lens are fixed together through an optical adhesive, and the arc surface of the micro convex lens is located above a black light absorption layer of the chip body. 本发明提供了一种适于NDIR原理气体传感器芯片及其制备方法，其将微凸透镜与NDIR红外气体传感器芯片在芯片制造过程中就进行集成，使得微凸透镜能够很好的汇聚聚集红外光的能量在红外检测芯片的敏感区域，提升了芯片输出，进而提升了整个传感器的气体探测灵敏度，其特征在于：其包括芯片本体和微凸透镜，所述芯片本体和微凸透镜通过光学胶粘剂固定在一起，所述微凸透镜的圆弧面位于芯片本体的黑色吸光层上方。