Substrate holding hand and substrate transfer robot

• Main Authors: SHIMIZU IPPEI, TAKAUJI RYUNOSUKE, YAMADA REI
• Format: Patent
• Language: Chinese; English
• Published: 09.09.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HAND TOOLS; MANIPULATORS; PERFORMING OPERATIONS; PORTABLE POWER-DRIVEN TOOLS; SEMICONDUCTOR DEVICES; TRANSPORTING

A substrate holding hand according to the present invention is provided with: a support plate in which a circular reference capture range is defined; a plurality of pads disposed within the reference capture range; at least one fixed stopper disposed along the outer circumference of the reference capture range; at least one movable stopper having a portion at a height equal to that of the fixed stopper from the support plate; and a stopper actuator configured to move the movable stopper from a retracted position outside the reference capture range to an entry position closer to the fixed stopper than the retracted position. A circular narrowing capture range is defined by the movable stopper and the front stopper in the entry position, and the diameter of the narrowing capture range is larger than the diameter of the substrate and smaller than the diameter of the capture range. 本发明的基板保持手具备：支承板，规定有圆形的基准捕获范围；多个垫，配置在基准捕获范围内；至少1个固定限位器，沿着基准捕获范围的外周圆配置；至少1个可动限位器，具有与固定限位器相比距支承板的高度一致的部分；以及限位器致动器，构成为使可动限位器从基准捕获范围的外侧的退避