Remote plasma source ceramic reaction cavity and plasma source with same

• Main Authors: ZHANG DECAI, HONG JINGWEI
• Format: Patent
• Language: Chinese; English
• Published: 02.09.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TRANSPORTING

The invention discloses a remote plasma source ceramic reaction cavity and a plasma source with the same, and relates to the technical field of plasma source cavities. The whole device is made of a ceramic material, and comprises two semicircular annular tubular chambers, an air inlet pipe and an ai...