Remote plasma source ceramic reaction cavity and plasma source with same

• Main Authors: ZHANG DECAI, HONG JINGWEI
• Format: Patent
• Language: Chinese; English
• Published: 02.09.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TRANSPORTING

The invention discloses a remote plasma source ceramic reaction cavity and a plasma source with the same, and relates to the technical field of plasma source cavities. The whole device is made of a ceramic material, and comprises two semicircular annular tubular chambers, an air inlet pipe and an air outlet pipe, the cavity is of an overall annular structure formed by sealing and welding two semi-annular tubular cavities through a microwave welding ceramic technology. According to the invention, the contact collision between the plasma and the inner wall of the cavity when the plasma spirally moves in the cavity is reduced, so that the impact damage of an anodic oxide film on the inner wall of the plasma is reduced, and the service life of the cavity is prolonged; according to the utility model, the ceramic material is adopted, so that the structure has the advantages of light weight, proper price, good corrosion resistance and high temperature resistance, the symmetry of the structure is ensured, the air tig