Laser scanning optical system and method based on three rotary optical wedges

• Main Authors: HE LEI, ZHANG XUAN, CHEN XUCHENG, ZHOU QIANG, HOU XINRUI, LI WANGWANG
• Format: Patent
• Language: Chinese; English
• Published: 02.09.2022
• Subjects: CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

The invention discloses a laser scanning optical system and method based on three rotary optical wedges, and belongs to the technical field of laser application, the laser scanning optical system comprises a first wedge-shaped mirror, a second wedge-shaped mirror, a third wedge-shaped mirror and a focusing mirror which are sequentially arranged along the incident direction of light, and the first wedge-shaped mirror, the second wedge-shaped mirror, the third wedge-shaped mirror and the focusing mirror are coaxially arranged; and the phase difference between the first wedge-shaped mirror and the second wedge-shaped mirror is adjusted, so that the scanning radius of a graph on the focal plane of the focusing mirror is continuously adjustable. The device is used for machining small micropores, and the situation that when deep holes are machined, laser is blocked by the upper surfaces of the holes, and conical holes appear can be effectively avoided; it is ensured that the machined hole is a straight hole, and th