Micro-electro-mechanical heater

• Main Authors: CHEN MINGFA, LI BAIXUN
• Format: Patent
• Language: Chinese; English
• Published: 30.08.2022
• Subjects: ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY

The invention discloses a micro-electro-mechanical heater. The micro-electro-mechanical heater comprises an insulating substrate, a heat insulating part and a heating part, the heat insulation member comprises a plurality of supporting structures and at least one heat insulation layer. The support structure is disposed on the insulating substrate. The heat insulating layer is located above the insulating substrate and connected with the supporting structure. The heat insulating layer is spaced from the insulating substrate by a distance. The heating piece is arranged on the heat insulation layer. 本发明公开一种微机电加热器，其包含一绝缘基板、一绝热件及一加热件。绝热件包含多个支撑结构及至少一绝热层。支撑结构设置于绝缘基板上。绝热层位于绝缘基板上方且与支撑结构连接。绝热层与绝缘基板间隔一距离。加热件设置于绝热层上。