Terahertz film thickness measuring device and electronic equipment

• Main Authors: ZHANG YIZHU, QU QIUHONG, HE MINGXIA
• Format: Patent
• Language: Chinese; English
• Published: 30.08.2022
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention provides a terahertz film thickness measuring device and electronic equipment, belongs to the technical field of terahertz equipment, and solves the problem that an existing terahertz film thickness measuring instrument cannot accurately obtain position data of a measured coating film. The terahertz film thickness measuring device comprises a spectrometer host, a terahertz probe and a position detection mechanism, the terahertz probe is in communication connection with the spectrometer host, and the terahertz probe is fixed at the front end of the spectrometer host; the front end of the terahertz probe is provided with a terahertz window sheet, the terahertz window sheet is provided with a terahertz emergent window, and the position detection mechanism is arranged on the terahertz window sheet; the position detection mechanism comprises laser equipment, a PSD position detector, a lens and an ADC conversion chip; the laser device is arranged around the terahertz exit window, the PSD position dete