Z-type MEMS double-layer solenoid inductor double-layer coil and integrated preparation method

• Main Authors: ZHANG XIAO, ZHU KAIYUN, XU TIANTONG, TAO ZHI, WANG WENBIN, LEI KAIBO, LI HAIWANG
• Format: Patent
• Language: Chinese; English
• Published: 12.08.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRICITY; INDUCTANCES; MAGNETS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; TRANSFORMERS; TRANSPORTING

The invention discloses a Z-type MEMS double-layer solenoid inductor double-layer coil, an integrated preparation method thereof and an inductance element. The Z-type MEMS double-layer solenoid inductor double-layer coil comprises an inner double-layer coil, an outer double-layer coil and a substrate. The double-layer coil is an MEMS double-layer solenoid inductance double-layer coil with a silicon substrate or a poured flexible substrate as a basic substrate, an existing single-layer MEMS solenoid inductance coil is expanded to be a double-layer coil, the dimension of the MEMS inductance coil is greatly expanded, and a new breakthrough is made in the aspects of inductance value improvement and quality factor improvement. Compared with a traditional C-type winding mode, the Z-type winding has the advantages that the capacitance effect under the high frequency can be well restrained, the resonant frequency can be further improved, and therefore the Z-type winding can be used for some applications of a radio fr