Z-type MEMS double-layer solenoid inductor double-layer coil and integrated preparation method
The invention discloses a Z-type MEMS double-layer solenoid inductor double-layer coil, an integrated preparation method thereof and an inductance element. The Z-type MEMS double-layer solenoid inductor double-layer coil comprises an inner double-layer coil, an outer double-layer coil and a substrat...
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Main Authors | , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
12.08.2022
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Subjects | |
Online Access | Get full text |
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Summary: | The invention discloses a Z-type MEMS double-layer solenoid inductor double-layer coil, an integrated preparation method thereof and an inductance element. The Z-type MEMS double-layer solenoid inductor double-layer coil comprises an inner double-layer coil, an outer double-layer coil and a substrate. The double-layer coil is an MEMS double-layer solenoid inductance double-layer coil with a silicon substrate or a poured flexible substrate as a basic substrate, an existing single-layer MEMS solenoid inductance coil is expanded to be a double-layer coil, the dimension of the MEMS inductance coil is greatly expanded, and a new breakthrough is made in the aspects of inductance value improvement and quality factor improvement. Compared with a traditional C-type winding mode, the Z-type winding has the advantages that the capacitance effect under the high frequency can be well restrained, the resonant frequency can be further improved, and therefore the Z-type winding can be used for some applications of a radio fr |
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Bibliography: | Application Number: CN202210481359 |