Filter based on reverse binary blazed grating and manufacturing method

• Main Authors: CHENG XIULAN, XU JINBIN, QUAN XUELING, LI YAQIAN, LIAO RUJUN
• Format: Patent
• Language: Chinese; English
• Published: 05.08.2022
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The invention provides a filter based on a reverse binary blazed grating and a manufacturing method. The filter comprises a silicon substrate, a buried oxide layer and top silicon, one side of the buried oxide layer is connected with top layer silicon, and the other side is connected with the silicon substrate; the top layer silicon comprises a forward binary blazed grating, a cone-shaped body, a waveguide and a reverse binary blazed grating; the two ends of the waveguide are respectively connected with the forward binary blazed grating and the reverse binary blazed grating through conical bodies. According to the silicon-based optical filtering device, the function of selecting the filtering function in the communication O wave band can be achieved only through the on-chip I/O port, and the design process and the machining difficulty can be greatly simplified on the premise that the filtering performance is not reduced. 本发明提供了一种基于反向二元闪耀光栅的滤波器及制造方法，包括：硅衬底、埋氧层以及顶层硅；埋氧层一侧连接为顶层硅，另一侧连接硅衬底；顶层硅包括：正向二元闪耀光栅、锥形体、波导以及反