INTEGRATED UV RADIATION SENSOR

• Main Authors: ROGER FLORENT, BLIEM PAULO, ELMSTEINER GERHARD, PLESS HEIKO, BUSS MICHAEL, LICHNER FRANK, JAZAYELIFAR, MUHAMMAD, SIESS GREGORY, KOMMA JOHANN
• Format: Patent
• Language: Chinese; English
• Published: 02.08.2022
• Subjects: COLORIMETRY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; RADIATION PYROMETRY; TESTING

An integrated radiation sensor is disclosed. The integrated radiation sensor includes a first optical filter associated with a first radiation sensing element and a second optical filter associated with a second radiation sensing element. The first optical filter is configured to deliver radiation having a wavelength in the UV-C range to the first radiation sensing element. The second optical filter is configured to deliver radiation having a wavelength longer than a wavelength in the UV-C range to the second radiation sensing element. A method of making an integrated radiation sensor and a method of using an integrated radiation sensor are also disclosed. 公开了一种集成辐射传感器。集成辐射传感器包括与第一辐射感测元件相关联的第一光学滤波器和与第二辐射感测元件相关联的第二光学滤波器。第一光学滤波器被配置为将波长在UV-C范围内的辐射传递到第一辐射感测元件。第二光学滤波器被配置为将波长长于UV-C范围内的波长的辐射传递到第二辐射感测元件。还公开了一种制造集成辐射传感器的方法和使用集成辐射传感器的方法。