Optically determining electrical contacts between metal features in different layers in structure

• Main Authors: GOWLEY, BRIAN, H, HANSON, SHAUN, B
• Format: Patent
• Language: Chinese; English
• Published: 29.07.2022
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

Optically determining whether metal features in different layers in a structure are in electrical contact with each other is described. When the metal features include different metals and/or have different sizes, resulting in detection of one or more resonances in the reflected radiation, it is determined that the metal features in different layers are in contact or not in contact with each other based on the spectral position of the one or more resonances. When the metal features are formed of the same metal and have the same size, in response to detecting a single resonance associated with the metal features, it is determined that the metal features in different layers are in contact with each other, and in response to detecting two or more resonances associated with the metal features, it is determined that the metal features are not in contact with each other. 描述了光学地确定结构中不同层中的金属特征是否彼此电接触。当金属特征包括不同的金属和/或具有不同的尺寸，导致检测到反射辐射中的一个或多个共振时，基于一个或多个共振的光谱位置，确定不同层中的金属特征彼此接触或不接触。当金属特征由相同金属形成并且具有相同尺寸时，响应于检测到与金属特征相关联的单个共