Optical element surface defect identification method

• Main Authors: ZHAO SHIYAN, WANG LEI, HUANG SILING, WANG DASEN, NIE FENGMING, GUO HAILIN, FAN AIGUO, LI WEIJIE, PEI NING, ZHANG XU, XIA CHAOXIANG, LI XIAOJING
• Format: Patent
• Language: Chinese; English
• Published: 12.07.2022
• Subjects: CALCULATING; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS

The invention relates to an optical element surface defect identification method. The method comprises the following steps: step 1, image acquisition; 2, splicing the sub-aperture defect images of all the optical elements to obtain a complete full-aperture defect image of the optical elements; step 3, carrying out preprocessing segmentation on the complete full-aperture defect image of the optical element by adopting a global threshold value, so that a gray level image background is segmented from the defect; step 4, preprocessing the defect grey-scale map, and extracting features and morphological parameters of the defect; and 5, performing classification according to the features and morphological parameters of the defects to obtain a defect classification result. The method has the advantages that the complete full-aperture defect image of the optical element is preprocessed and segmented through the global threshold value, so that the background and the defect of the gray image are segmented, the defect d