Hybrid low resistance metal wire

• Main Authors: ZHU JOHN JIANHONG, BAO JUNJING, NALLAPATI GIRIDHAR
• Format: Patent
• Language: Chinese; English
• Published: 08.07.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A standard cell for use in semiconductor device design and manufacture and a method for manufacturing a standard cell are disclosed. Aspects disclosed include a standard cell having a plurality of wide metal lines. The wide metal line is formed of copper. The standard cell also includes a plurality...