METHOD FOR REMOVING PRODUCT, METHOD FOR REMOVING FLUX, AND DEVICE FOR REMOVING PRODUCT

The invention relates to a method for removing a product, a method for removing a flux, and a device for removing a product. A method for removing a product, in which an atmosphere gas having a product generated inside a processing chamber in a low-oxygen atmosphere is introduced into a product remo...

Full description

Saved in:
Bibliographic Details
Main Authors YAMAGUCHI TADASHI, TAKANO YASUYUKI, KANDA TOSHIRO, MATSUMOTO YOSHIKI
Format Patent
LanguageChinese
English
Published 28.06.2022
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:The invention relates to a method for removing a product, a method for removing a flux, and a device for removing a product. A method for removing a product, in which an atmosphere gas having a product generated inside a processing chamber in a low-oxygen atmosphere is introduced into a product removal unit having a corona discharge space, and the product included in the atmosphere gas is removed, includes: a mixing step in which the atmosphere gas is mixed with the corona discharge space; a mixing step in which the atmosphere gas discharged from the processing chamber via a pipe connecting the processing chamber and the corona discharge space is mixed with a high-resistance gas having a higher resistance than the atmosphere gas in the pipe or the corona discharge space to generate a mixed gas; and a removal step for removing the product from the mixed gas by means of a corona discharge method in the corona discharge space into which the mixed gas is introduced via the pipe or in which the mixed gas is genera
Bibliography:Application Number: CN202111575326