METHOD FOR REMOVING PRODUCT, METHOD FOR REMOVING FLUX, AND DEVICE FOR REMOVING PRODUCT
The invention relates to a method for removing a product, a method for removing a flux, and a device for removing a product. A method for removing a product, in which an atmosphere gas having a product generated inside a processing chamber in a low-oxygen atmosphere is introduced into a product remo...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
28.06.2022
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a method for removing a product, a method for removing a flux, and a device for removing a product. A method for removing a product, in which an atmosphere gas having a product generated inside a processing chamber in a low-oxygen atmosphere is introduced into a product removal unit having a corona discharge space, and the product included in the atmosphere gas is removed, includes: a mixing step in which the atmosphere gas is mixed with the corona discharge space; a mixing step in which the atmosphere gas discharged from the processing chamber via a pipe connecting the processing chamber and the corona discharge space is mixed with a high-resistance gas having a higher resistance than the atmosphere gas in the pipe or the corona discharge space to generate a mixed gas; and a removal step for removing the product from the mixed gas by means of a corona discharge method in the corona discharge space into which the mixed gas is introduced via the pipe or in which the mixed gas is genera |
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Bibliography: | Application Number: CN202111575326 |