Control system and method for polycrystalline silicon production simulation

• Main Authors: FENG LIUJIAN, ZHANG XIAFEI, ZHAO PENG, ZHANG ZHAODONG, XIE RUI, WANG WEN, FAN XIECHENG, SONG GAOJIE
• Format: Patent
• Language: Chinese; English
• Published: 24.06.2022
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; INORGANIC CHEMISTRY; METALLURGY; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; NON-METALLIC ELEMENTS; PHYSICS; REGULATING

The invention discloses a control system for polycrystalline silicon production simulation. The control system comprises a 3D simulation system, furnace testing equipment and a big data intelligent control system. And the 3D simulation system is used for carrying out analogue simulation according to the equipment parameters and outputting the obtained thermal field and flow field to the big data intelligent control system. And the furnace testing equipment is used for carrying out production according to the equipment parameters and the production process parameters, collecting production state data in real time and outputting the production state data to the big data intelligent control system. And the big data intelligent control system is used for obtaining optimized equipment parameters according to the thermal field, the flow field and the production state data, outputting the optimized equipment parameters to the 3D simulation system for next three-dimensional simulation, obtaining optimized production