Polycrystalline silicon production control method and system

• Main Authors: FENG LIUJIAN, ZHANG XIAFEI, ZHAO PENG, ZHANG ZHAODONG, XIE RUI, WANG WEN, FAN XIECHENG, SONG GAOJIE
• Format: Patent
• Language: Chinese; English
• Published: 24.06.2022
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; INORGANIC CHEMISTRY; METALLURGY; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; NON-METALLIC ELEMENTS; PHYSICS; REGULATING

The invention discloses a polycrystalline silicon production control method, which comprises the following steps of: performing optimization control on polycrystalline silicon production equipment to obtain optimized equipment parameters; the polycrystalline silicon production equipment is improved according to the optimized equipment parameters; and performing optimization control on the polycrystalline silicon production process of the improved polycrystalline silicon production equipment to obtain a target polycrystalline silicon product. Correspondingly, the invention further discloses control equipment for polycrystalline silicon production. According to the control method and equipment, the polycrystalline silicon production process can be accurately controlled, and the product quality is improved. 本发明公开一种多晶硅生产的控制方法，包括：对多晶硅生产设备进行优化控制，以获取优化后的设备参数；根据优化后的设备参数对所述多晶硅生产设备进行改进；对改进后的多晶硅生产设备的多晶硅生产过程进行优化控制，以获取目标多晶硅产品。相应的，还公开一种多晶硅生产的控制设备。该控制方法和设备可实现准确控制多晶硅生产的过程，提高产品质量。