Semiconductor fault analysis device

• Main Authors: ARATA IKUO, ITO YOSHIHIRO, IKESU MASATAKA, ISHIZUKA TOSHIMICHI
• Format: Patent
• Language: Chinese; English
• Published: 10.06.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

This semiconductor failure analysis device (1) is provided with: a tester (2) that applies a stimulation signal to a semiconductor device (100); a light source (3) that generates irradiation light (L1) that irradiates the semiconductor device (100); a solid immersion lens (4) disposed on the optical path of the irradiation light (L1); a light detection unit (5) that receives the reflected light (L2) and outputs a detection signal corresponding to the reflected light (L2); an optical system (6) that is disposed between the light source (3) and the solid immersion lens (4), emits irradiation light (L1) to the semiconductor device (100) via the solid immersion lens (4), is disposed between the solid immersion lens (4) and the optical detection unit (5), and emits reflected light (L2) received via the solid immersion lens (4) to the optical detection unit (5); and a computer (7) that obtains information relating to a fault location of the semiconductor device (100) using the detection signal. The light source (3)