Vacuum flash evaporation and annealing integrated system suitable for preparing perovskite thin film

• Main Authors: SUN YOUMING, LIU SHENGZHONG, DUAN LIANJIE, WANG LIKUN, WANG KAI, CAO YUEXIAN, DU MINYONG, WANG HUI
• Format: Patent
• Language: Chinese; English
• Published: 07.06.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention relates to the technical field of solar cells, in particular to a vacuum flash evaporation and annealing integrated system suitable for preparing a perovskite thin film, which comprises a vacuum cavity, a temperature control system and a vacuumizing system, and is characterized in that...