Vacuum flash evaporation and annealing integrated system suitable for preparing perovskite thin film

• Main Authors: SUN YOUMING, LIU SHENGZHONG, DUAN LIANJIE, WANG LIKUN, WANG KAI, CAO YUEXIAN, DU MINYONG, WANG HUI
• Format: Patent
• Language: Chinese; English
• Published: 07.06.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention relates to the technical field of solar cells, in particular to a vacuum flash evaporation and annealing integrated system suitable for preparing a perovskite thin film, which comprises a vacuum cavity, a temperature control system and a vacuumizing system, and is characterized in that the temperature control system comprises a temperature sensor, a cooling assembly and a heating assembly, and a hollow interlayer is arranged in the cavity wall of the vacuum cavity; the cooling assembly and the heating assembly are arranged in the interlayer, the temperature in the vacuum cavity is monitored in real time through the temperature sensor, an end pipeline with a first valve is arranged on one side of the vacuum cavity, the interior of the vacuum cavity is vacuumized through the vacuumizing system, and a first vacuum gauge is arranged on the vacuum cavity. The vacuum pump set, the forevacuum cavity and the temperature control system are introduced into the perovskite thin film preparation system at th