SYSTEMS AND METHODS FOR RADIAL AND ORIENTAL CONTROL OF PLASMA UNIFORMITY

• Main Authors: TRAN TOAN, KOBAYASHI SATORU, LUBOMIRSKY DMITRY, PARK SEYONG, SUGAI HIDEO, KALNIN NIKOLAI
• Format: Patent
• Language: Chinese; English
• Published: 27.05.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A system includes a process chamber, a housing defining a waveguide cavity, and a first electrically conductive plate within the housing. The first conductive plate faces the process chamber. The system also includes one or more adjustment devices that can adjust at least a position of the first con...