Ion nitrogen-carbon-sulfur multi-element co-permeation auxiliary equipment, treatment system and method

• Main Authors: WANG ZHENGWEI, LUO JIANBIN, LI YANG, ZHANG ZHEHAO, DONG YONGKANG, SHAO MINGHAO, HE YONGYONG
• Format: Patent
• Language: Chinese; English
• Published: 13.05.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention provides ion nitrogen-carbon-sulfur multi-element co-permeation auxiliary equipment, a treatment system and a method, and the auxiliary equipment comprises a hollow cathode ion source placed at the top of a furnace body of an ion diffusion furnace, an insulating shell placed on the side wall of the furnace body, and a plurality of coaxial electromagnets which are sequentially arranged in the insulating shell at intervals from inside to outside, the winding modes of every two adjacent electromagnets are opposite, and the multiple electromagnets are used for forming a controllable magnetic field in the ion diffusion furnace so as to change the movement track of electrons on the surface of the metal workpiece and the magnetic domain of the metal workpiece. The treatment system comprises an ion diffusion and permeation furnace, ion nitrogen-carbon-sulfur multi-element co-permeation auxiliary equipment, a transformer, a vacuum pump, a gas supply bottle and an electric control cabinet. The treatment m