Flow adjustment valve, pump unit, and surface treatment device

• Main Authors: FUKUYAMA SATOSHI, NOSE KOICHI, KURIHARA YOSHIAKI, NANBA TAKESHI
• Format: Patent
• Language: Chinese; English
• Published: 06.05.2022
• Subjects: ACTUATING-FLOATS; BLASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COCKS; CONTROLLING; DEVICES FOR VENTING OR AERATING; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; NON-POSITIVE DISPLACEMENT PUMPS; PHYSICS; PLASMA TECHNIQUE; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; REGULATING; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TAPS; THERMAL INSULATION IN GENERAL; VALVES; WEAPONS

The invention relates to a flow rate adjusting valve, a pump unit, and a surface treatment apparatus. In order to adjust the flow rate of a fluid with high precision, a flow rate adjustment valve (150) is provided with: a flow path section (151) having an opening (152) formed at one end thereof and through which the fluid flows; a lift valve (153) capable of covering the entire area of the opening (152) and closing the opening (152), capable of opening the opening (152) by being separated from the opening (152) in the opening direction of the opening (152), and capable of changing the flow area (DA) facing the opening (152) by changing the distance (d) from the opening (152) in the opening direction; and a servo actuator (160) as a drive mechanism for moving the lift valve (153) in the opening direction on the basis of the predetermined detection value. 本发明涉及流量调整阀、泵单元以及表面处理装置。为了以较高精度对流体的流量进行调整，流量调整阀(150)具备：流路部(151)，在一端形成有开口部(152)，供流体流动；升降阀(153)，能够对开口部(152)的整个区域进行覆盖而将开口部(152)关闭，且能够通过从开口部(152)向开口部(152)的开口方向分离而将