Five-degree-of-freedom measurement system and method based on two-dimensional absolute grating

• Main Authors: ZHAO HUINING, NIU RURU, ZHANG ZUO, XIA HAOJIE, WU YUTONG
• Format: Patent
• Language: Chinese; English
• Published: 29.04.2022
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; TARIFF METERING APPARATUS; TESTING

The invention discloses a five-degree-of-freedom measurement system based on a two-dimensional absolute grating. The five-degree-of-freedom measurement system comprises a CCD camera, a coaxial light telecentric lens, a laser, a beam splitter, a field-of-view separation device, a two-dimensional absolute grating coding disc, a plane mirror and an image processing module, the two-dimensional absolute grating coding disc is fixed on the precise workbench; coaxial light emitted by the coaxial light telecentric lens is irradiated on the two-dimensional absolute grating coding disc through the view field separation device to form two independent view fields; the CCD camera obtains an image in the field of view and transmits the image to the image processing module, and X-Y-theta position information is obtained after processing; light emitted by the laser is irradiated to the plane mirror pasted on the two-dimensional absolute grating coding disc through the beam splitter, and the light is projected to the CCD came