Miniature in-situ temperature measurement high-temperature atom molecule evaporation and emission device

• Main Authors: FU YUNQING, YAO KE, CHEN JIHUI, JIANG ZIHUAN, QIAN YUYUAN, HE ZHENCEN, HUANG LIANGYU
• Format: Patent
• Language: Chinese; English
• Published: 22.04.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MEASURING; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; METALLURGY; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

The invention relates to a miniature in-situ temperature measurement high-temperature atom molecule evaporation and emission device which is characterized in that a cooling sleeve is mounted on a vacuum connecting support, a second-stage steam nozzle, a first-stage steam nozzle and a high-temperature heating sleeve are mounted at the top of the cooling sleeve, and a double-head crucible is arranged in the high-temperature heating sleeve; an atomic molecule solid sample is placed in the double-head crucible, a temperature measuring probe is installed at the bottom of the double-head crucible, the first-stage steam nozzle and the second-stage steam nozzle are steam ejection beam limiting collimation holes with replaceable aperture type design, and the cooling sleeve is used for cooling and shielding high temperature in the device. The high-temperature heating sleeve is used for heating the double-end crucible; the temperature measuring probe is used for measuring the internal temperature of the double-head cruc