Feedback sensor for MEMS mirrors

• Main Authors: QUINRIN, VINCENT, DEL GAIZO STEVEN A
• Format: Patent
• Language: Chinese; English
• Published: 19.04.2022
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

An optical mirror assembly includes a mirror having a reflective surface and a rear surface opposite the reflective surface. The mirror is inclined about a first axis or a second axis perpendicular to the first axis. The optical mirror assembly further comprises an inverted light emitting device (LE...