Feedback sensor for MEMS mirrors

• Main Authors: QUINRIN, VINCENT, DEL GAIZO STEVEN A
• Format: Patent
• Language: Chinese; English
• Published: 19.04.2022
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

An optical mirror assembly includes a mirror having a reflective surface and a rear surface opposite the reflective surface. The mirror is inclined about a first axis or a second axis perpendicular to the first axis. The optical mirror assembly further comprises an inverted light emitting device (LED) of a feedback sensor arranged to emit light onto the rear surface of the mirror; and four photodiodes of the feedback sensor arranged to receive reflected light generated from a rear surface of the mirror reflecting light emitted by the inverted LED. Each of the four photodiodes is disposed in a different one of four quadrants defined by the first axis and the second axis, and the inverted LED is disposed at a center of the four photodiodes. 一种光学镜组件包括镜，其具有反射表面和与该反射表面相对的后表面。该镜围绕第一轴线或垂直于该第一轴线的第二轴线倾斜。该光学镜组件还包括反馈传感器的倒置发光器件(LED)，其布置成将光发射到镜的后表面上；以及反馈传感器的四个光电二极管，其布置成接收从镜的反射由倒置LED发射的光的后表面产生的反射光。四个光电二极管中的每个设置在由第一轴线和第二轴线限定的四个象限中的不同一个中，并且倒置LED设置在四个光电二极管的中心处。