Wafer test probe station and test method thereof
The invention belongs to the technical field of semiconductor preparation, particularly relates to a wafer test probe station and a test method thereof, and aims to solve the problems that wafers are detected one by one in the conventional detection mode, that is to say, the wafers need to be placed...
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| Main Author | |
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| Format | Patent |
| Language | Chinese English |
| Published |
15.04.2022
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| Subjects | |
| Online Access | Get full text |
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