Mask plate assembly, evaporation method of display device and display device

• Main Authors: ZHAO CHENGYU, QIN SHAOYANG, WANG SHOUKUN, SUN ZENGBIAO
• Format: Patent
• Language: Chinese; English
• Published: 12.04.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention provides a mask plate assembly, an evaporation method of a display device and the display device. The mask plate assembly comprises a first mask plate and a second mask plate. The first mask plate comprises a first frame, a first shielding part located in the first frame, a first connecting part connected with the first frame and the first shielding part, and a first evaporation opening, the first evaporation opening corresponds to at least part of pixel opening positions, and the first shielding part corresponds to the position of the light-transmitting area; the second mask plate is used in cooperation with the first mask plate, the second mask plate comprises a second frame, a second shielding part located in the second frame, a second connecting part connecting the second frame and the second shielding part and a second evaporation opening, and the second evaporation opening corresponds to the position between at least two pixel openings; the second shielding part corresponds to the position